Lábadi Zoltán
Combinatorial Sputtering and Characterization of Advanced Metal Oxide Based Sensors and Devices


Intézmény: Óbudai Egyetem
anyagtudományok és technológiák
Anyagtudományok és Technológiák Doktori Iskola

témavezető: Lábadi Zoltán
helyszín (magyar oldal): MFA EK
helyszín rövidítés: MFA

A kutatási téma leírása:

The physical, chemical and structural properties of mixed oxide materials are strongly dependent on their composition. Use of combinatorial material synthesis principle allows preparation of a continuous set of samples covering the whole composition range produced in a single experiment on a single substrate.
Proper characterization tools (Spectroscopic Ellipsometry - SE, Rutherford Backscattering Spectrometry - RBS, Transmission Electron Microscopy - TEM, Scanning Electron Microscopy - SEM, Atomic Force Microscopy - AFM) are also available at MFA EK. These methods can help to search more efficient advanced functional materials for micro- and optoelectronics, electrochromic devices and different (optical or gas) sensor systems.

Materials to be studied
Preparation and characterization of Tungsten, Molybdenum, Tin and Titanium mixed oxide thin films for efficient gas sensors and electro-chromic devices.
Metal oxides can take part in redox reaction therefore change their color under proper DC bias. This reversible color change is known as electro-chromism. The potential application of electrochromic windows is: sensors, displays, and automotive rear-view mirrors. Tungsten, Molybdenum, Tin and Titanium oxides belong to this group of oxides, however their mixed oxides received relatively less attention in the literature.
Metal oxide films are beneficial for solid state gas sensors. There is a need to improve the sensor signal, selectivity, stability and the rate of sensor response by optimizing the chemical, structural, bulk and surface properties of applied metal oxides. Tungsten, Molybdenum, Tin and Titanium oxides are among the most promising materials for this purpose, but relatively less effort is made to understand the properties of mixed oxides.
In the frame of this proposal, we aim to understand the electrochromic and sensor properties of mixed Tungsten, Molybdenum, Tin and Titanium oxides deposited by reactive sputtering. We will prepare thin films of mixed Tungsten Oxide and Molybdenum Oxide by reactive DC magnetron sputtering. The deposited films will be characterized by a variety of methods

Jelentkezési határidő: 2023-02-03

Minden jog fenntartva © 2007, Országos Doktori Tanács - a doktori adatbázis nyilvántartási száma az adatvédelmi biztosnál: 02003/0001. Program verzió: 2.2358 ( 2017. X. 31. )